Surface Polishing Publications

Publications in Surface Polishing

Explore the most influential research papers and scholarly works that have shaped Surface Polishing. Use the concept filter below to focus on a specific sub-area of research.

Surface Polishing

2.3K

Publications

90.6K

Citations

Showing yearly statistics from 2000-2026.

Page 1

	Year	Citations
Relation Between Surface Roughness and Specular Reflectance at Normal Incidence H. E. Bennett, J. O. Porteus Journal of the Optical Society of America Optical MaterialsEngineeringSurface ReflectanceOptical PropertiesSpectroscopy	1961	1.1K
Chemical processes in glass polishing Lee M. Cook Journal of Non-Crystalline Solids Materials ScienceGlass-ceramicChemical EngineeringEngineeringCorrosion	1990	972
The Theory and Design of Plate Glass Polishing Machines F. W. Preston Medical Entomology and Zoology Materials ScienceEngineeringMaterial MachiningMechanical EngineeringMachine Tool	1927	740
Material removal mechanism in chemical mechanical polishing: theory and modeling Jianfeng Luo, David Dornfeld IEEE Transactions on Semiconductor Manufacturing EngineeringMechanical EngineeringAbrasive ProcessChemical EngineeringMaterial Processing	2001	623
Characterization of surfaces by grazing X-ray reflection: Application to the study of the polishing of various silicate glasses L. Névot, Paul Jerome Croce Materials ScienceGlass-ceramicOptical MaterialsEngineeringOptical Properties	1980	576
Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects F. B. Kaufman, Daniel B. Thompson, R. E. Broadie, Journal of The Electrochemical Society EngineeringMechanical EngineeringChip InterconnectsSurface TechnologyMaterial Processing	1991	506
Material Removal Mechanisms in Lapping and Polishing C. J. Evans, E. Paul, D. Dornfeld, CIRP Annals Materials ScienceEngineeringMechanical EngineeringMaterial Removal MechanismsRecycling	2003	377
Metallographic Polishing by Mechanical Methods Peter H. Bartels, L.E. Samuels Transactions of the American Microscopical Society Materials ScienceEngineeringCorrosionMechanical EngineeringMetallography	1972	308
Environment friendly chemical mechanical polishing of copper Zhenyu Zhang, Junfeng Cui, Jiabo Zhang, Applied Surface Science Materials ScienceMaterials EngineeringChemical EngineeringEngineeringCorrosion	2018	300
A micro-contact and wear model for chemical–mechanical polishing of silicon wafers Yongwu Zhao, L. Chang Wear Materials ScienceSilicon WafersEngineeringWear ModelWafer Scale Processing	2002	299
MAGNETORHEOLOGICAL FINISHING William Kordonski, Stephen D. Jacobs International Journal of Modern Physics B Materials ScienceEngineeringMaterial ProcessingMicrofabricationCorrosion	1996	282
The �??Precessions�?? tooling for polishing and figuring flat, spherical and aspheric surfaces David Walker, D. Brooks, Andrew King, Optics Express EngineeringGeometryMechanical EngineeringPrecessions ToolsGeometry Generation	2003	274

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